An Oxidation Behavior of the Amorphous Titanium Chromium Nitride Thin Films

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Published: Dec 27, 2023
Keywords:
thin film sputtering oxidation

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Adisorn Buranawong
Material Innovation Research Laboratory, Department of Physics, Faculty of Science, Burapha University
Nirun Witit-anun
Material Innovation Research Laboratory, Department of Physics, Faculty of Science, Burapha University

Abstract

Titanium chromium nitride (TiCrN) thin films were deposited on Si by reactive DC magnetron sputtering technique from a mosaic target. The oxidation behavior of TiCrN films was investigated by annealing in ambient air at 500-900oC for 1 h. The as-deposited film was characterized by X-ray diffraction techniques (XRD), energy-dispersive X-ray spectroscopy (EDS), and field-emission scanning electron microscopy (FE-SEM). The oxidation rate and oxidation activation energy were calculated from Wagner’s equation and Arrhenius’s equation, respectively. The results showed that the as-deposited thin film had an amorphous TiCrN structure. After annealing up to 900oC, the films still showed the amorphous structure. The EDS analysis found that the as-deposited films were composed of titanium, chromium, nitrogen, and oxygen in a different ratio. In addition, the oxygen content in the film increased with annealed temperature. The cross-sectional analysis from the FE-SEM technique showed a very thin oxide layer on surface of the as-deposited TiCrN film at 700oC and the oxide layer thickness was increased with the annealed temperature. Moreover, the as-deposited films were fully oxidized at 900oC. The results revealed that the as-deposited films can resist the oxidation up to 600oC, and the oxidation rate of films varied with annealing temperature. The oxidation activation energy was 134.90 kJ/mol.

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How to Cite
Buranawong, A., & Witit-anun, N. . (2023). An Oxidation Behavior of the Amorphous Titanium Chromium Nitride Thin Films. Vocational Education Innovation and Research Journal, 7(2), 106–115. retrieved from https://so06.tci-thaijo.org/index.php/ve-irj/article/view/266945
Issue
Vol. 7 No. 2 (2566): July - December
Section
Research Articles
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โทร  0-4241-1445,0-4241-1447
ISSN : 3027-6861 (print) ISSN : 3027-687X (online)

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